Zenith Etch i250
The Zenith Etch provides enhanced pumping performance with the latest generation GX drypumps, combined with The Inline 250 uses hot bed reactor technology to chemically convert the toxic by-products from metal etch into safe solids.
Informacje
Features and Benefits
- Lower installation costs
- Shorter installation time
- Full compliance to national and international electrical and safety standards and SEMI S2-0303
Dane techniczne
| Process connections | |
| Process gas inlets | ISO 100 stainless steel (ISO 63 / NW50 / NW40 available with adapter options) |
| Loadlock / transfer inlet | ISO 100 stainless steel (ISO 63 / NW50 / NW40 available with adapter options) |
| Bypass outlet | NW40 stainless steel |
| Abatement system exhaust outlet | 75 mm diameter polypropylene |
| Cabinet extraction outlet | 150 mm diameter x 150 mm deep, painted mild steel |
| Services connections | |
| Nitrogen inlet | 1/2 inch Swagelok, stainless steel |
| Oxygen inlet | 1/2 inch VCR, stainless steel |
| Fuel gas inlet | 3/4 inch Swagelok, stainless steel |
| Cooling-water supply inlet | NW40 stainless steel |
| Cooling-water return outlet | NW40 stainless steel |
| Make-up water inlet | 3/4 inch nominal bore uPVC pipe |
| Acid water drain outlet | 3/4 inch nominal bore uPVC pipe |
| Electrical connections | |
| Electrical supply cable gland (power module not fitted) | 50 mm diameter |
| Electrical supply cable gland (power module fitted) | |
| 3-phase power supply | 50 mm diameter |
| 1-phase power supply | 25 mm diameter |
| Outlet to transformer (option) | 16 mm diameter |
| Power Requirements | |
| Supply | 3-phase 400, 208V, 50/60Hz 1-phase 230, 110V, 50/60Hz |
| Mechanical Data | |
| Mass | |
| Abatement module | 222kg |
| Drypump module (without pumps) | 230kg |
| Control and facilities module | 182kg |
| Power module (if fitted) | 128kg |
Pliki do pobrania
Vacuum and Abatement for the LED Industry Datasheet