Zenith CVD Chemical Vapor Deposition

Zenith CVD is the generic name for a range of application-specific integrated pump and abatement systems for Chemical Vapor Deposition processes. Zenith CVD is supplied with a choice of abatement modules, which include Thermal Processor Unit (TPU), Thermal Conditioning System (TCS), Helios or Kronis abatement module.
 
The exact choice of abatement technology is driven by the CVD process type, the process recipe and customer requirements pertaining to utility availability, cost of ownership and abatement performance. Zenith CVD provides enhanced safety, assured process tool compatibility, minimum footprint and reduced cost of ownership compared to the more conventional approach of using standalone abatement and pumping systems. A centralized control strategy allows for energy conservation through 'Active Utility Control'.
 
Other benefits include lower installation costs, shorter installation time and full compliance to national and international electrical and safety standards and SEMI S2-0303.

Features and Benefits

•     Lower installation costs
•     Shorter installation time
•     Full compliance to national and international electrical and safety standards and SEMI S2-0303