Zenith CVD and Zenith EPI
The Zenith CVD provides the most reliable vacuum pumps for the CVD and epitaxial harsh-duty environments integrated with exhaust management capable of handling pyrophorics, flammables and high flows of corrosive gases.
Informacje
Features and Benefits
- Lower installation costs
- Shorter installation time
- Full compliance to national and international electrical and safety standards and SEMI S2-0303
Dane techniczne
| Process connections | |
| Process gas inlets | ISO 100 stainless steel (ISO 63 / NW50 / NW40 available with adapter options) |
| Loadlock / transfer inlet | ISO 100 stainless steel (ISO 63 / NW50 / NW40 available with adapter options) |
| Bypass outlet | NW40 stainless steel |
| Abatement system exhaust outlet | 75 mm diameter polypropylene |
| Cabinet extraction outlet | 150 mm diameter x 150 mm deep, painted mild steel |
| Services connections | |
| Nitrogen inlet | 1/2 inch Swagelok, stainless steel |
| Oxygen inlet | 1/2 inch VCR, stainless steel |
| Fuel gas inlet | 3/4 inch Swagelok, stainless steel |
| Cooling-water supply inlet | NW40 stainless steel |
| Cooling-water return outlet | NW40 stainless steel |
| Make-up water inlet | 3/4 inch nominal bore uPVC pipe |
| Acid water drain outlet | 3/4 inch nominal bore uPVC pipe |
| Electrical connections | |
| Electrical supply cable gland (power module not fitted) | 50 mm diameter |
| Electrical supply cable gland (power module fitted) | |
| 3-phase power supply | 50 mm diameter |
| 1-phase power supply | 25 mm diameter |
| Outlet to transformer (option) | 16 mm diameter |
| Power Requirements | |
| Supply | 3-phase 400, 208V, 50/60Hz 1-phase 230, 110V, 50/60Hz |
| Mechanical Data | |
| Mass | |
| Abatement module | 222kg |
| Drypump module (without pumps) | 230kg |
| Control and facilities module | 182kg |
| Power module (if fitted) | 128kg |
Pliki do pobrania
Vacuum and Abatement for the LED Industry Datasheet