STP301
Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.
This STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a connection cable and power cable.
Features and Benefits
- Advanced rotor technology
Maximized process flexibility
Oil free
Low vibration
High reliability
Maintenance free
- Advanced controller design
Auto tuning
Self diagnostic functions
d.c. motor drive
Battery-free operation
- Compact design
Small footprint
Half rack controller
Applications
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
| Inlet flange | ISO100, CF100 |
| Outlet port | KF25 |
| Pumping Speed | |
| N2 | 300 ls-1 |
| H2 | 300 ls-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | >2 x 104 |
| Ultimate pressure with bake out heating (VG/ISO flange) | 6.5 x 10-6 Pa (5 x 10-8 Torr) |
| Ultimate pressure with bake out heating (ICF flange) | 10-8 Pa (10-10 Torr) |
| Maximum allowable inlet pressure (ambient cooled) | 0.066 Pa (5 x 10-4 Torr) |
| Max continuous outlet pressure (ambient cooled) | 13 Pa (0.1 Torr) |
| Rated speed | 48000 rpm |
| Starting time | 3 min |
| Maximum inlet flange temperature | 120 °C |
| Input voltage | 100 to 120 (± 10%) V a.c. or |
| 200 to 240 (± 10%) V a.c. | |
| Power consumption at start up | 0.55 kVA |
| Pump weight | 11 kg |
| Controller weight | 7 kg |