Pyrophoric Conditioning System (PCS)

he Pyrophoric Conditioning System (PCS) is a compact, cost-effective unit using the 'self-oxidation' principle to safely remove silane from PECVD and LPCVD process exhausts to below flammable limits.
The system offers many advantages over the simple "burn box". A positive air input, with full monitoring and interfacing to the process tool, offers assurance of operation. A unique particle handling system keeps ducts free from powders. A water wash-down is available as an option to further reduce preventative maintenance requirements.

Features and Benefits

• Low cost of ownership

        No fuel
        Low power

• Compact design

        Small footprint
        Single or dual inlets

• Built-in powder handling
• Enhanced security

        Full system monitoring
        Tool interface
        PLC controlled

• SEMI S2-93 and S8-95 compliant

        On-line cleaning and powder removal

Applications
The PCS is used to ensure that silane and other pyrophoric gases are removed below flammable limits in the exhausts from LPCVD/PECVD processes, including LCD/flat panel manufacture, Silane VMB and Gas Cylinder pigtail purging.
 
Normal process flows up to 1 slpm Silane, adverse/fault flows up to 6 slpm.
Total gas flow per inlet up to 100 slpm.