BGV pneumatic gate valve ISO63
The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation valves. They have been designed, in conjunction with VAT, to enable pumps to be kept running during foreline maintenance in order to maximise the reliability and up-time of pumps operating on harsh processes. The BGV valves are designed for an operating pressure range of 1 x 10-9 mbar to 1.2 bar absolute (1 x 10-7 to 1.2 x 105 Pa). The valves withstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differential pressure across the valve seal.
Although principally designed for isolation of pumps in a semiconductor fab basement, the BGV valves are ideal for other applications where a 1 bar differential at opening is desirable and 20000 cycles is acceptable.
Features and Benefits
- Jointly developed with VAT, a world leader in sealing technology.
- Stainless steel construction and robust patented design for a long service life
- Simple grease-free mechanism minimizes damage due to particulates in dusty processes
- Can be operated with 1 bar pressure differential so pressure equalization is not required
- Easy servicing with only inexpensive consumables for low cost of ownership
- Smooth surfaces for easy cleaning
- Available with solenoid fitted and wired for easy ordering and installation
- Plug and play compatible with Edwards semiconductor dry pump when used with optional BGV TIM interface cable.
| Leak rate | |
| Body | < 1 x 10-9 mbar ls-1 |
| Valve seat | < 1 x 10-7 mbar ls-1 |
| Pressure range | 1 x 10-9 mbar to 1.2 bara |
| Differential pressure on the gate | 1.2 bar in either direction |
| Differential pressure at opening | 1 bar |
| Cycles until first service | 20, 0000 |
| Maximum operating temperatures | |
| Valve body | 120 °C |
| Manual actuator | 80 °C |
| Pneumatic actuator | 80 °C |
| Position indicator | 60 °C |
| Solenoid | 50 °C |
| Molecular flow conductance | |
| NW50 | 300 ls-1 |
| ISO63 | 400 ls-1 |
| ISO80 | 1100 ls-1 |
| ISO100 | 1700 ls-1 |
| ISO160 | 4600 ls-1 |
| Weight | |
| NW50 | 3.3 kg (7.3 lbs) |
| ISO63 | 6.6 kg (14.6 lbs) |
| ISO80 | 7.0 kg (15.4 lbs) |
| ISO100 | 8.5 kg (18.7 lbs) |
| ISO160 | 17.7 kg (39.0 lbs) |
| Materials of construction: | |
| Body | AISI 304 stainless steel |
| Bonnet | Black anodized aluminum |
| Gate | AISI 304 stainless steel |
| Gliders | PEEK |
| Bellows | AISI 633 stainless steel |
| Seals | Fluoroelastomer |
| Gate fixation screw | A2 stainless steel Ni-teflon coated |
| Handle | Reinforced polyamide |
| Pneumatic valves | |
| Solenoid rating | |
| Standard solenoid | 24 V - 15% / + 10%, AC/DC, 2.4 W |
| Position indicator contact rating | 12 - 30 V AC/DC, max 500 mA, max 10 W |
| Pneumatic supply | |
| Min supply pressure | 58 psig (4 bar gauge, 5 bar absolute, 5 x 105 Pa) |
| Max supply pressure | 100 psig (7 bar gauge, 8 bar absolute, 8 x 105 Pa) |
| Pneumatic connection | R1/8 inch (1/8 inch NPT for valves ordered in USA) |