Atlas Helios
Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.
Informacje
Features and Benefits
- Proven high abatement performance for toxic, pyrophoric & corrosive gases
Reliable handling of associated powders
- Controlled and complete oxidation of hydrogen to safe limits
Capable of handling up to 200 lpm of hydrogen
Up to 4 process inlets
Applications
- Si Epitaxy
- III-V MOCVD
- SiGe Epitaxy
Dane techniczne
| Process connections | |
| Process gas inlets | NW40 stainless steel |
| Bypass outlet | NW40 stainless steel |
| Abatement system exhaust outlet | 75 mm diameter polypropylene |
| Cabinet extraction outlet | 150 mm diameter x 150 mm deep, painted mild steel |
| Services connections | |
| Nitrogen inlet | 1/2 inch Swagelok, stainless steel |
| Oxygen inlet | 1/4 inch Swagelok, stainless steel |
| Compressed dry air inlet | 1/4 inch Swagelok, stainless steel |
| Fuel gas inlet | 3/4 inch Swagelok, stainless steel |
| Cooling-water supply inlet | 25 mm GF union, polypropylene |
| Cooling-water return outlet | 25 mm GF union, polypropylene |
| Make-up water inlet | 25 mm GF union, polypropylene |
| Acid water drain outlet | 25 mm GF union, polypropylene |
| Electrical connections | |
| Electrical supply cable leadthrough | 32 mm cable-gland, suitable for 5-core double insulated cable |
| Customer interface cable leadthroughs | 16 mm cable-glands |
| Customer interface connections | Screw terminals |
| Power Requirements | |
| Supply | 3-phase 400,220,208,200V, 50/60Hz 1-phase 100V, 50/60Hz |
| Nominal power requirements | 1.3kW |
| Mechanical Data | |
| Mass | 530kg |
| 101.5kg (WRU E Model) | |
| 103.5kg (WRU S J Models) |
Pliki do pobrania
Atlas™ Gas Abatement Systems Datasheet