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SIPV40P, pneumatic, bellows sealed

Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination.


Features and Benefits

  • MTTF of 5000000 cycles
  • Controlled pump down to match process
  • Aluminum bodies
  • 100% grease free vacuum
  • Fast acting valves in the event of power failure
  • Bellows sealed for clean operation
  • Easy to service with replaceable orifices
  • Supplied with 5 mm, 6 mm and 7 mm interchangeable orifices
  • Bakeable to 100 °C to prevent condensation of process gases

When the slave valve is opened gas flows at a low rate between the two sides of the valve through interchangeable orifices allowing slow pumping. Having reached a predetermined pressure level specified by the user, the master valve is opened by means of a user supplied signal allowing full bore pumping.
The bellows sealed valves are single acting with pneumatic opening and spring closure. They are supplied with three interchangeable orifices to enable pumping characteristics to be matched to your process. A microswitch is supplied as standard to indicate valve status. Both the valve and the microswitch can be baked to 100°C to speed up degassing, and to prevent process gases from condensing inside the valve.
While designed primarily for the semiconductor industry the valve can also be used in other applications requiring controlled pump-down.

Dane techniczne
Valve actuation type Single acting, pneumatically opened, spring closed
Pressure range 1 x 10-9 to 2100 mbar
  8 x 10-10 to 1575 Torr
Maximum pressure differential  
  Opening 1000 mbar / 750 Torr
  Closing 2100 mbar / 1575 Torr
Leak rate 10-9 mbar ls- 1
  10-10 Torr ls- 1
Pneumatic connector Rp 1/8 ( 1/8 inch BSP)*
Pneumatic operating pressure 2.8 to 4.2 bar / 41 to 61 psi
Electrical indicator Single microswitch
Microswitch electrical rating 24 V, 1.5 A a.c. or d.c.
Max cycle frequency 900 h-1
Bellows reliability, MTTF 5000000 cycles
Ambient operating temperature 5 - 100 °C
Maximum baking temperature 100 °C
Construction materials HE30TF aluminum
O-ring Fluoroelastomer
Time to open/close at 4 bar (ms) SIPV40P
  Slave valve 60/20
  Master valve 50/155
Weight (g / oz)  
  SIPV40P 1760 / 62

*  With optional control valve fitted

Pliki do pobrania
SIPVP Soft Start Valves Instruction Manual