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BGV pneumatic gate valve ISO80

The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation valves. They have been designed, in conjunction with VAT, to enable pumps to be kept running during foreline maintenance in order to maximise the reliability and up-time of pumps operating on harsh processes. The BGV valves are designed for an operating pressure range of 1 x 10-9 mbar to 1.2 bar absolute (1 x 10-7 to 1.2 x 105 Pa). The valves withstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differential pressure across the valve seal.
Although principally designed for isolation of pumps in a semiconductor fab basement, the BGV valves are ideal for other applications where a 1 bar differential at opening is desirable and 20000 cycles is acceptable.


Features and Benefits

  •     Jointly developed with VAT, a world leader in sealing technology.
  •     Stainless steel construction and robust patented design for a long service life
  •     Simple grease-free mechanism minimizes damage due to particulates in dusty processes
  •     Can be operated with 1 bar pressure differential so pressure equalization is not required
  •     Easy servicing with only inexpensive consumables for low cost of ownership
  •     Smooth surfaces for easy cleaning
  •     Available with solenoid fitted and wired for easy ordering and installation
  •     Plug and play compatible with Edwards semiconductor dry pump when used with optional BGV TIM interface cable.
Dane techniczne
Leak rate  
  Body < 1 x 10-9 mbar ls-1
  Valve seat < 1 x 10-7 mbar ls-1
Pressure range 1 x 10-9 mbar to 1.2 bara
Differential pressure on the gate 1.2 bar in either direction
Differential pressure at opening 1 bar
Cycles until first service 20, 0000
Maximum operating temperatures  
  Valve body 120 °C
  Manual actuator 80 °C
  Pneumatic actuator 80 °C
  Position indicator 60 °C
  Solenoid 50 °C
Molecular flow conductance  
  NW50 300 ls-1
  ISO63 400 ls-1
  ISO80 1100 ls-1
  ISO100 1700 ls-1
  ISO160 4600 ls-1
  NW50 3.3 kg (7.3 lbs)
  ISO63 6.6 kg (14.6 lbs)
  ISO80 7.0 kg (15.4 lbs)
  ISO100 8.5 kg (18.7 lbs)
  ISO160 17.7 kg (39.0 lbs)
Materials of construction:  
  Body AISI 304 stainless steel
  Bonnet Black anodized aluminum
  Gate AISI 304 stainless steel
  Gliders PEEK
  Bellows AISI 633 stainless steel
  Seals Fluoroelastomer
  Gate fixation screw A2 stainless steel Ni-teflon coated
  Handle Reinforced polyamide
Pneumatic valves  
Solenoid rating  
  Standard solenoid 24 V - 15% / + 10%, AC/DC, 2.4 W
Position indicator contact rating 12 - 30 V AC/DC, max 500 mA, max 10 W
Pneumatic supply  
  Min supply pressure 58 psig (4 bar gauge, 5 bar absolute, 5 x 105 Pa)
  Max supply pressure 100 psig (7 bar gauge, 8 bar absolute, 8 x 105 Pa)
Pneumatic connection R1/8 inch (1/8 inch NPT for valves ordered in USA)
Pliki do pobrania
BGV Stainless Steel Gate Valve Datasheet