EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Zenith III-V

Zenith III-V

The Zenith III-V Series provides fully-integrated abatement and vacuum pump solutions for MOCVD applications incorporating the Helios inward-fired combustion technology, reliable iH dry vacuum pump technology, Temperature Management System (TMS) and an integrated control strategy. The system provides high-quality treatment of toxic, compound semiconductor process exhaust gases and organometallic precursors in addition to the handling of high flows of hydrogen.

Informacje

Features and Benefits

  •     Lower installation costs
  •     Shorter installation time
  •     Full compliance to national and international electrical and safety standards and SEMI S2-0303
Dane techniczne
Process connections  
Process gas inlets ISO 100 stainless steel (ISO 63 / NW50 / NW40
available with adapter options)
Loadlock / transfer inlet ISO 100 stainless steel (ISO 63 / NW50 / NW40
available with adapter options)
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/2 inch VCR, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet NW40 stainless steel
Cooling-water return outlet NW40 stainless steel
Make-up water inlet 3/4 inch nominal bore uPVC pipe
Acid water drain outlet 3/4 inch nominal bore uPVC pipe
Electrical connections  
Electrical supply cable gland (power module not fitted) 50 mm diameter
Electrical supply cable gland (power module fitted)  
   3-phase power supply 50 mm diameter
   1-phase power supply 25 mm diameter
   Outlet to transformer (option) 16 mm diameter
Power Requirements  
   Supply 3-phase 400, 208V, 50/60Hz
1-phase 230, 110V, 50/60Hz
Mechanical Data  
Mass  
   Abatement module 222kg
   Drypump module (without pumps) 230kg
   Control and facilities module 182kg
   Power module (if fitted) 128kg
Pliki do pobrania
Vacuum and Abatement for the LED Industry Datasheet