EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Zenith CVD Chemical Vapor Deposition

Zenith CVD Chemical Vapor Deposition

Zenith CVD is the generic name for a range of application-specific integrated pump and abatement systems for Chemical Vapor Deposition processes. Zenith CVD is supplied with a choice of abatement modules, which include Thermal Processor Unit (TPU), Thermal Conditioning System (TCS), Helios or Kronis abatement module.
 
The exact choice of abatement technology is driven by the CVD process type, the process recipe and customer requirements pertaining to utility availability, cost of ownership and abatement performance. Zenith CVD provides enhanced safety, assured process tool compatibility, minimum footprint and reduced cost of ownership compared to the more conventional approach of using standalone abatement and pumping systems. A centralized control strategy allows for energy conservation through 'Active Utility Control'.
 
Other benefits include lower installation costs, shorter installation time and full compliance to national and international electrical and safety standards and SEMI S2-0303.

Informacje

Features and Benefits

  •     Lower installation costs
  •     Shorter installation time
  •     Full compliance to national and international electrical and safety standards and SEMI S2-0303
Dane techniczne
Process connections  
Process gas inlets ISO 100 stainless steel (ISO 63 / NW50 / NW40
available with adapter options)
Loadlock / transfer inlet ISO 100 stainless steel (ISO 63 / NW50 / NW40
available with adapter options)
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/2 inch VCR, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet NW40 stainless steel
Cooling-water return outlet NW40 stainless steel
Make-up water inlet 3/4 inch nominal bore uPVC pipe
Acid water drain outlet 3/4 inch nominal bore uPVC pipe
Electrical connections  
Electrical supply cable gland (power module not fitted) 50 mm diameter
Electrical supply cable gland (power module fitted)  
   3-phase power supply 50 mm diameter
   1-phase power supply 25 mm diameter
   Outlet to transformer (option) 16 mm diameter
Power Requirements  
   Supply 3-phase 400, 208V, 50/60Hz
1-phase 230, 110V, 50/60Hz
Mechanical Data  
Mass  
   Abatement module 222kg
   Drypump module (without pumps) 230kg
   Control and facilities module 182kg
   Power module (if fitted) 128kg
Pliki do pobrania
Vacuum and Abatement for the LED Industry Datasheet