EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Water Cooled Trap (WCT)

Water Cooled Trap (WCT)

LPCVD nitride processes using dichlorosilane (SiH2Cl2) and ammonia (NH3) generate ammonium chloride (NH4Cl). On cooling, at atmospheric pressure, NH4Cl rapidly condenses out as a solid in the exhaust lines causing blockages. The water cooled trap provides a cost-effective solution for controlled deposition of these solid by-products. Both the trap and the liner are water-cooled so NH4Cl is deposited on the liner. The liner has a large capacity and is quick and easy to change.

Informacje

Features and Benefits

  • Designed for LPCVD Nitride Processes

        Reduces downtime
        Minimizes exhaust blockages

  • Controlled Collection of Condensing Solids

        Ammonia (NH3) and Dichlorosilane (SiH2Cl2) processes only

  • Compatible with All Edwards Vacuum Pumps
  • Quick and Easy Liner Replacement
  • Very Low Cost of Ownership

        Process cooling water is the only facilities requirement

  • Minimum Footprint
Dane techniczne
Footprint: 450 mm (17.72") x 480 mm (18.90")
Height: 965 mm (38") to 1397 mm (55")
  depending on height of pump outlet
Inlet Connection: NW40
Outlet Connection: NW40
Water Inlet Connection: 3/8" BSP male quick connect
Water Outlet Connection: 3/8" BSP female quick connect
Maximum Water Pressure: 7 bar gauge
  700 kPa gauge