EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Spectra G

Spectra G

The Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.

Informacje

Features and Benefits

  • High Abatement Performance

        Capable of treating all exhaust gases from multiple MOCVD production tools
        Unique combustion technology allows abatement of NH3 while minimizing NOx emissions

  • Proven Superior Reliability

        Excellent powder handling for high throughput applications
        High uptime as proven in leading nitride MOCVD production operations
        Proven on all leading OEM’s applications

  • Risk Management

        Combustion of all flammable gases
        Air-cooled design as standard

  • Low Cost of Ownership

        Minimum fuel gas consumption for full process gas abatement
        Up to six process inlets
        Alternative fuel options
        No water or oxygen requirement
        Low power consumption
        Low nitrogen consumption
        800 slm capacity
        Indoor or outdoor installations


Applications
The Spectra-G can incorporate up to six independent inlet ports. The independent inlet ports ensure that premixing of incompatible gases does not take place upstream of the burner. This means that simultaneous input of incompatible gases can be treated by a single Spectra-G through different inlets.

Dane techniczne
Maximum gas flow rate 800 slm
Number of inlet ports 1 to 6
Electrical supply 200-208 VAC 3-phase
Frequency 50/60 Hz
Power consumption 4 kW
Nitrogen supply pressure 7 bar
Fuel gas supply pressure 137 mbar (2 psi)
Extract flow rate 60 Nm 3/min
Mass 850 Kg
Pliki do pobrania
Spectra G datasheet