EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Spectra Z

Spectra Z

The Spectra-Z system is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD) and Solar Cell manufacturing processes.

Informacje

Features and Benefits

  • High Abatement Performance

        Capable of treating gases from FPD generation 8+ process tools
        Efficient abatement of deposition and chamber cleaning gases

  • Proven Superior Reliability

        Corrosion resistant system
        Excellent powder handling for high flow silane applications
        High uptime as proven in major FPD and solar cell operations worldwide

  • Risk Management

        Combustion of all flammable gases
        Air-cooled design as standard

  • Low Cost of Ownership

        Minimum fuel gas consumption for full process gas abatement
        Up to six process gas inlets
        No water or oxygen required
        Low power consumption
        Low nitrogen consumption
        800 and 3000 slm capacity versions


Applications
The Spectra-Z system is a cost-effective, reliable, high performance exhaust treatment solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.

Dane techniczne

Spectra-Z 800 Spectra-Z 3000
Maximum gas flow rate 800 slm 3000 slm
Number of inlet ports 1 to 6 1 to 6
Electrical supply 200-208 VAC 3-phase 200-208 VAC 3-phase
Frequency 50/60 Hz 50/60 Hz
Power consumption 4 kW 6 kW
Nitrogen supply pressure 6-8 bar 6-8 bar
Fuel gas supply pressure 137 mbar (2 psi) 137 mbar (2 psi)
Extract flow rate 60 Nm 3/min 180 Nm3/min
Mass 850 Kg 1,450 Kg
Pliki do pobrania
Spectra Z Datasheet