The Edwards ReGIS is a process-enabling technology, which when coupled with the Edwards iH Series drypumps, provides maximum pump uptime and process stability for tungsten nitride processes.
Vacuum pump reliability and process stability are key to achieving cost-effective, high-quality WN films. The ReGIS enables these performance criteria without the issues associated with conventional traps. Process gases and by-products are reacted into volatile species that do not require traps, but pass through the vacuum pump.
Features and Benefits
- Low cost of ownership
- Maximizes tool uptime
- Self-contained system
- Superior to conventional traps
- Enables process stability