he Pyrophoric Conditioning System (PCS) is a compact, cost-effective unit using the 'self-oxidation' principle to safely remove silane from PECVD and LPCVD process exhausts to below flammable limits.
The system offers many advantages over the simple "burn box". A positive air input, with full monitoring and interfacing to the process tool, offers assurance of operation. A unique particle handling system keeps ducts free from powders. A water wash-down is available as an option to further reduce preventative maintenance requirements.
Features and Benefits
- Low cost of ownership
- Compact design
Single or dual inlets
- Built-in powder handling
- Enhanced security
Full system monitoring
- SEMI S2-93 and S8-95 compliant
On-line cleaning and powder removal
The PCS is used to ensure that silane and other pyrophoric gases are removed below flammable limits in the exhausts from LPCVD/PECVD processes, including LCD/flat panel manufacture, Silane VMB and Gas Cylinder pigtail purging.
Normal process flows up to 1 slpm Silane, adverse/fault flows up to 6 slpm.
Total gas flow per inlet up to 100 slpm.
|Process gas inlet||NW40 Stainless Steel|
|PCS Exhaust Outlet||NW40 Stainless Steel|
|Nitrogen Inlet||1/4” Swagelok ®|
|4-6 bar gauge|
|Water (OCM only)||1” PVC pipe|
|Single phase supply||230V 50HZ|
|or - 110V 50/60HZ|
|Nominal Power Consumption||0.65kW|
|Mechanical Data||Mass: 66kg|
|Tool Interface||PCS alarm output MUST be interfaced to silane flow on process tool|