EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > HOx - Hot Oxidation System

HOx - Hot Oxidation System

The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Targeted at CVD applications, the system ensures safe removal of pyrophoric gases to below flammable limits and the effective treatment of acidic by-products to prevent exhaust duct corrosion.
 
The HOx combines an innovative electrical heated oxidation unit with the proven three-stage wet scrubber from the inward-fired combustor product range to deliver excellent powder handling capabilities.

Informacje

Features and Benefits

  • Low capital cost
  • Low cost of ownership

        No fuel
        Low water use
        Low power
        Small footprint

  • Enhanced security

        PLC controlled
        Full system monitoring
        Tool interface
        SEMI S2-93 compliant

  • Superior design

        High performance

  • Up to 4 independent self cleaning inlets
  • Unique oxidation chamber design increases destruction efficiencies while minimizing particulate deposition
  • Proven three stage wet scrubber (from the inward fired combustor range) provides blockage-free particulate entrapment and highly efficient acid gas removal
  • Novel construction on sliding platform provides easy servicing, resulting in lower maintenance requirements compared to competing units
  • Integral bypass valves available as optional extra feature
  • Integral water recirculation unit available as optional extra feature, to minimize utility consumption and COO


Applications
Ideal for most CVD applications including:

  • PECVD TEOS, BPSG, Oxide
  • PECVD Nitride
  • Tungsten CVD
  • LPCVD
Dane techniczne
Connections  
 Process gas inlets NW40 SS, 4 inlets
 Exhaust outlet 75mm flexible bellows
 Nitrogen inlet 1/4" Swagelok ®
  Stainless steel 4-6 bar gauge
 Water 3/4" bore PVC Pipe
 PCW 3/4" bore PVC Pipe
(water recirculation unit)  
Power Requirements  
 Supply Three phase 415/380v, 50Hz
 Or Three phase 208v, 50/60Hz
 Consumption Nominal 5kW
Mechanical Data  
 Dimensions 1300x600x1835mm
 Mass 400kg