EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Atlas TPU

Atlas TPU

The Atlas TPU is a world proven system and the semiconductor industry's standard abatement system for CVD. In one model, there is suitability for all CVD and Etch applications, enabling World Semiconductor Council PFC emission reduction targets to be met. Each inlet can be individually configured for the highest level of abatement of all PFC gases, Fluorine (F2) or Chlorine TriFluoride (ClF3).

Informacje

Features and Benefits

  • Low Cost of Ownership

        Water Recirculation Unit (WRU) ensures low water usage

  • Unrivalled Abatement Performance

        Independently verified
        Provides high flow, high performance, CF4 abatement
        Capable of treating high flows of ClF3

  • Robust Field Performance
  • Certified to SEMI S2, CE Marked and ETL Listed


Applications
The TPU can manage the process exhausts from four CVD or etch chambers, and each inlet can be independently configured for optimum PFC destruction performance.

Dane techniczne
Process connections  
Process gas inlets NW40 stainless steel
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/4 inch Swagelok, stainless steel
Compressed dry air inlet 1/4 inch Swagelok, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet 25 mm GF union, polypropylene
Cooling-water return outlet 25 mm GF union, polypropylene
Make-up water inlet 25 mm GF union, polypropylene
Acid water drain outlet 25 mm GF union, polypropylene
Electrical connections  
Electrical supply cable leadthrough 32 mm cable-gland, suitable for 5-core double insulated cable
Customer interface cable leadthroughs 16 mm cable-glands
Customer interface connections Screw terminals
Power Requirements  
  Supply 3-phase 400,220,208,200V, 50/60Hz
1-phase 100V, 50/60Hz
  Nominal power requirements 1.3kW
Mechanical Data  
  Mass 530kg
  101.5kg (WRU E Model)
  103.5kg (WRU S J Models)
Pliki do pobrania
Atlas™ Gas Abatement Systems Datasheet