Atlas TCS

Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.
The Atlas TCS provides reliable, high performance, low cost abatement of flammable and acid gases from CVD exhausts. The Atlas TCS incorporates the unique inward-fired radiant combustor and high-efficiency multi-stage water scrubber developed for the Thermal Processing range and is ideally suited to the treatment of exhaust streams from CVD tools employing remote plasma NF3 cleans and high flows of F2.


Features and Benefits

  • High performance, robust abatement

        Capable of removing pyrophoric and acid gases to below TLV
        Safe treatment of up to 20 slpm fluorine
        Excellent powder handling capabilities

  • Low cost of ownership

        Water recirculation for reduced water usage
        Full tool interfacing for utilities conservation

  • OEM recommended
  • Maximized tool uptime

        Low thermal mass facilitates rapid servicing
        Field proven, corrosion-resistant design

  • Small footprint
  • Supported by global field service organisation
  • Third-party certification

        SEMI S2, F15 certified, ETL Listed

The TCS is suitable for all CVD processes where PFC destruction is not required, but a need still exists for effective powder handling and hazardous air pollutant (HAP) abatement.

  • CVD and remote plasma NF3 chamber cleaning
Dane techniczne
Process connections  
Process gas inlets NW40 stainless steel
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/4 inch Swagelok, stainless steel
Compressed dry air inlet 1/4 inch Swagelok, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet 25 mm GF union, polypropylene
Cooling-water return outlet 25 mm GF union, polypropylene
Make-up water inlet 25 mm GF union, polypropylene
Acid water drain outlet 25 mm GF union, polypropylene
Electrical connections  
Electrical supply cable leadthrough 32 mm cable-gland, suitable for 5-core double insulated cable
Customer interface cable leadthroughs 16 mm cable-glands
Customer interface connections Screw terminals
Power Requirements  
  Supply 3-phase 400,220,208,200V, 50/60Hz
1-phase 100V, 50/60Hz
  Nominal power requirements 1.3kW
Mechanical Data  
  Mass 530kg
  101.5kg (WRU E Model)
  103.5kg (WRU S J Models)
Pliki do pobrania
Atlas™ Gas Abatement Systems Datasheet