Atlas Kronis

Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.
Achieving clean combustion of low k organosilane precursors is challenging, and failure to do so results in unacceptable by-products and blockages in downstream systems. Ultimately such blockages can cause unscheduled downtime. Edwards has gained an in-depth understanding of low k CVD process issues by working extensively with OEMs and materials suppliers during process development.


Features and Benefits

  • High performance abatement

        Destroys all low k CVD precursors and clean species simultaneously
        Complete reaction eliminates clogging issues
        Environmental and health and safety compliance assured

  • Extensive OEM qualification program
  • Low cost of ownership

        Controlled, cost-effective combustion
        Option to run on compressed dry air
        Water recirculation reduces water usage

  • Maximised tool uptime

        Excellent handling of high powder volumes
        Field-proven, corrosion-resistant design for chamber cleaning gases
        Supported by Edwards’ global service team for unrivalled field reliability

  • Enhanced wafer security

        PLC Controlled, tool interfacing and full system monitoring

  • Third-party certification

        SEMI S2, F15 certified, ETL listed

The Atlas Kronis is suitable for all low k CVD processes using precursors such as:

  • Trimethylsilane (3MS)
  • Tetramethylsilane (4MS)
  • Dimethyldimethoxyorthosilane (DMDMOS)
  • Tetramethylcyclotetrasiloxane (TMCTS)
  • Octomethylcyclotetrasiloxane (OMCTS)
Dane techniczne
Process connections  
Process gas inlets NW40 stainless steel
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/4 inch Swagelok, stainless steel
Compressed dry air inlet 1/4 inch Swagelok, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet 25 mm GF union, polypropylene
Cooling-water return outlet 25 mm GF union, polypropylene
Make-up water inlet 25 mm GF union, polypropylene
Acid water drain outlet 25 mm GF union, polypropylene
Electrical connections  
Electrical supply cable leadthrough 32 mm cable-gland, suitable for 5-core double insulated cable
Customer interface cable leadthroughs 16 mm cable-glands
Customer interface connections Screw terminals
Power Requirements  
  Supply 3-phase 400,220,208,200V, 50/60Hz
1-phase 100V, 50/60Hz
  Nominal power requirements 1.3kW
Mechanical Data  
  Mass 530kg
  101.5kg (WRU E Model)
  103.5kg (WRU S J Models)
Pliki do pobrania
Atlas™ Gas Abatement Systems Datasheet