EDVAC > Produkty Edwards Vacuum > Exhaust Management Systems > Atlas Helios

Atlas Helios

Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.

Informacje

Features and Benefits

  • Proven high abatement performance for toxic, pyrophoric & corrosive gases

         Reliable handling of associated powders

  • Controlled and complete oxidation of hydrogen to safe limits

         Capable of handling up to 200 lpm of hydrogen
         Up to 4 process inlets


Applications

  • Si Epitaxy
  • III-V MOCVD
  • SiGe Epitaxy
Dane techniczne
Process connections  
Process gas inlets NW40 stainless steel
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/4 inch Swagelok, stainless steel
Compressed dry air inlet 1/4 inch Swagelok, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet 25 mm GF union, polypropylene
Cooling-water return outlet 25 mm GF union, polypropylene
Make-up water inlet 25 mm GF union, polypropylene
Acid water drain outlet 25 mm GF union, polypropylene
Electrical connections  
Electrical supply cable leadthrough 32 mm cable-gland, suitable for 5-core double insulated cable
Customer interface cable leadthroughs 16 mm cable-glands
Customer interface connections Screw terminals
Power Requirements  
  Supply 3-phase 400,220,208,200V, 50/60Hz
1-phase 100V, 50/60Hz
  Nominal power requirements 1.3kW
Mechanical Data  
  Mass 530kg
  101.5kg (WRU E Model)
  103.5kg (WRU S J Models)
Pliki do pobrania
Atlas™ Gas Abatement Systems Datasheet