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Atlas Etch

Abatement solution for Generation 5, 6 and 7 Flat Panel Etch Processes
 
Application challenges
 
Modern FPD (Flat Panel Display) Etch processes combine the use of large PFC gases flows (typically SF6 and/or CF4) with large flows of Chlorine (Cl2) and Hydrochloric acid (HCl). A generation 6 etch process tool will typically combine 12slm of SF6 and/or 8slm of CF4, with 15slm of Cl2 or 15slm HCl. Combustion abatement methods are faced with three challenges: the combustion of large PFC gas flows (PFCs are extremely stable chemical compounds), in the presence of large Cl2 flows (chlorine acts as a flame-suppressant), and the management of acidic by-products (HCl, HF, H2SO4 and SO2).
 
Atlas Etch has successfully met with all three challenges. Optimisation of the combustion process and smart management of the gas input enable destruction and removal efficiencies (DREs) greater than 99% for SF6 and greater than 90% for CF4, even in the presence of Chlorine. The use of corrosion resistant materials in the design of the wet scrubbing stages ensures that Atlas Etch can remove acidic by-products reliably whilst maintaining low water consumption and high process uptime.

Informacje

Features and Benefits

  • Proven high abatement performance for toxic, pyrophoric & corrosive gases

             Reliable handling of associated powders

  • Controlled and complete oxidation of hydrogen to safe limits

            Capable of handling up to 200 lpm of hydrogen
            Up to 4 process inlets


Applications

  •     Si Epitaxy
  •     III-V MOCVD
  •     SiGe Epitaxy
Dane techniczne
Process connections  
Process gas inlets NW40 stainless steel
Bypass outlet NW40 stainless steel
Abatement system exhaust outlet 75 mm diameter polypropylene
Cabinet extraction outlet 150 mm diameter x 150 mm deep, painted mild steel
Services connections  
Nitrogen inlet 1/2 inch Swagelok, stainless steel
Oxygen inlet 1/4 inch Swagelok, stainless steel
Compressed dry air inlet 1/4 inch Swagelok, stainless steel
Fuel gas inlet 3/4 inch Swagelok, stainless steel
Cooling-water supply inlet 25 mm GF union, polypropylene
Cooling-water return outlet 25 mm GF union, polypropylene
Make-up water inlet 25 mm GF union, polypropylene
Acid water drain outlet 25 mm GF union, polypropylene
Electrical connections  
Electrical supply cable leadthrough 32 mm cable-gland, suitable for 5-core double insulated cable
Customer interface cable leadthroughs 16 mm cable-glands
Customer interface connections Screw terminals
Power Requirements  
 Supply 3-phase 400,220,208,200V, 50/60Hz
1-phase 100V, 50/60Hz
 Nominal power requirements 1.3kW
Mechanical Data  
 Mass 530kg
  101.5kg (WRU E Model)
  103.5kg (WRU S J Models)
Pliki do pobrania
Atlas™ Gas Abatement Systems Datasheet