Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.


Features and Benefits
Advanced rotor technology 

  •  Higher gas throughput
  •  Maximized process flexibility
  •  Oil free
  •  Low vibration
  •  High reliability
  •  Maintenance free
  •  Harsh process compatible
  •  Increased life

Advanced controller design 

  •  Auto tuning
  •  Self diagnostic functions
  •  d.c. motor drive
  •  Battery-free operation

Compact design 

  •  Small footprint
  •  Half rack controller
  •  5 axis magnetic suspension system
  •  Zero contamination
  •  Low maintenance
  •  Any orientation operation


  •  Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  •  Electron cyclotron resonance (ECR) etch
  •  Film deposition CVD, PECVD, ECRCVD, MOCVD
  •  Sputtering
  •  Ion implantation source, beam line pumping end station
  •  MBE
  •  Diffusion
  •  Photo resist stripping
  •  Crystal/epitaxial growth
  •  Wafer inspection
  •  Load lock chambers
  •  Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  •  High energy physics: beam lines, accelerators
  •  Radioactive applications: fusion systems, cyclotrons


Dane techniczne
Inlet flange ISO100K
Outlet port KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping Speed  
  N2 300 ls-1
  H2 200 ls-1
Compression ratio  
  N2 >108
  H2 103
Ultimate pressure with bake out heating 10-7 Pa
  (10-9 Torr)
Max continuous outlet pressure 660 Pa
  (5 Torr)
Max Nitrogen throughput 2500 sccm
Rated speed 48000 rpm
Starting time 4 min
Max inlet flange temperature 120 °C
Input voltage 100 to 120 (± 10) V a.c. or
  200 to 240 (± 10) V a.c.
Power consumption 0.6 kVA
Pump weight 15 kg
Controller weight 9 kg
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure