EDVAC > Produkty Edwards Vacuum > Pompy Turbomolekularne > STP603

STP603

Edwards STP603 is a new turbomolecular pump for use in the most advanced semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Informacje

Features and Benefits

  • Advanced rotor technology 

         Maximized process flexibility
         Oil free
         Low vibration
         High reliability
         Maintenance free

  • Advanced controller design 

         Auto tuning
         Self diagnostic functions
         d.c. motor drive
         Battery-free operation

  • Compact design 

         Small footprint
         Half rack controller

Applications

  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons
Dane techniczne
Inlet flange ISO160F
Outlet port KF40
Pumping Speed  
  N2 650 ls-1
  H2 550 ls-1
Compression ratio  
  N2 >108
  H2 >105
Ultimate pressure with bake out heating (VG/ISO flange) 6.5 x 10-6 Pa
  (5 x 10-8 Torr)
Ultimate Pressure with bake out heating (ICF flange) 10-7 Pa
  (10-9 Torr)
Max continuous outlet pressure 13 Pa (0.1 Torr)
Rated speed 35000 rpm
Starting time 6 min
Max inlet flange temp 120 °C
Input voltage 100 to 120 (± 10) V a.c. or
  200 to 240 (± 10) V a.c.
Power consumption at start up 0.8 kVA
Pump weight 31 kg
Controller weight 9 kg
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure