Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.
This STP pump is supplied with an inlet screen.
For a complete installation order an STP pump, a controller, a connection cable and power cable.


Features and Benefits

  • Advanced rotor technology 

         Maximized process flexibility
         Oil free
         Low vibration
         High reliability
         Maintenance free

  • Advanced controller design 

         Auto tuning
         Self diagnostic functions
         d.c. motor drive
         Battery-free operation

  • Compact design 

         Small footprint
         Half rack controller


  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons


Dane techniczne
Inlet flange ISO100, CF100
Outlet port KF25
Pumping Speed  
  N2 300 ls-1
  H2 300 ls-1
Compression ratio  
  N2 >108
  H2 >2 x 104
Ultimate pressure with bake out heating (VG/ISO flange) 6.5 x 10-6 Pa (5 x 10-8 Torr)
Ultimate pressure with bake out heating (ICF flange) 10-8 Pa (10-10 Torr)
Maximum allowable inlet pressure (ambient cooled) 0.066 Pa (5 x 10-4 Torr)
Max continuous outlet pressure (ambient cooled) 13 Pa (0.1 Torr)
Rated speed 48000 rpm
Starting time 3 min
Maximum inlet flange temperature 120 °C
Input voltage 100 to 120 (± 10%) V a.c. or
  200 to 240 (± 10%) V a.c.
Power consumption at start up 0.55 kVA
Pump weight 11 kg
Controller weight 7 kg
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure