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Produkty Edwards Vacuum

Pompy Turbomolekularne

STP-L301C

Edwards corrosion resistant STP-L301(C) is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility.
 
The STP-L301(C) has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.

Informacje

Features and Benefits

  • Advanced rotor technology 

        Maximized process flexibility
        Oil free
        Low vibration
        High reliability
        Maintenance free

  • Advanced controller design 

        Auto tuning
        Self diagnostic functions
        d.c. motor drive
        Battery-free operation

  • Compact design 

        Small footprint
        Half rack controller

  • Low vibration 

        Built in vibration isolation system gives improved performance over STP301C and external isolator

Applications

  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons
Dane techniczne
Inlet flange ISO100, CF100
Outlet port KF25
Purge port KF10
Pumping Speed  
  N2 260 ls-1
  H2 290 ls-1
Compression ratio  
  N2 >108
  He 5 x 105
  H2 2 x 104
Ultimate pressure with bake out heating (VG/ISO flange) 6.5 x 10-6 Pa
  (5 x 10-8 Torr)
Ultimate Pressure with bake out heating (ICF flange) 10-8 Pa
  (10-10 Torr)
Max allowable inlet pressure ambient cooled 6.7 x 10-2 Pa
  (5 x 10-4 Torr)
Max continuous outlet pressure ambient cooled 13 Pa
  (0.1 Torr)
Rated speed 48000 rpm
Starting time 3 min
Maximum inlet flange temperature 120 °C
Input voltage 100 to 120 (± 10) V a.c. or
  200 to 240 (± 10) V a.c.
Power consumption at start up 0.55 kVA
Pump weight 13 kg
Controller weight 7 kg
Pliki do pobrania
Edwards Maglev Turbos and the Environment Brochure